Mini tech museum

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0 Mini tech museum	1 Fabrication of photomask
2 Photoresist coating, patterning and etching	3 Wafer process (oxidation, diffusion, ion implantation)
4 Chemical vapor deposition (CVD) and RF induction heating	5 Physical vapor deposition (PVD (evaporation、sputtering))
6 Assembly (dicing, wire bonding, soldering) and test	7 Vacuum pump (rotary pump, turbo molecular pump, diffusion pump, ion pump, cryopump)
8 Vacuum gauges and quadrupole mass spectrometer	9 Xray photoelectron spectroscopy (XPS)
10 Auger electron spectroscopy (AES)	11 Optical microscope for measurement
12 Various measurement method other than optics	13 Gas laser, photomultiplier and radiation thermometer
14 A liq.4He / liq.N2 cryostat Dewer by double

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Card Index (A1 to N4 – Full List)

M1 Five‐storied pagoda made of glass