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東北大学マイクロシステム融合研究開発センター
〒980-0845 仙台市青葉区荒巻字青葉519-1176
東北大学西澤潤一記念研究センター内
Tel: 022-229-4113 Fax: 022-229-4116
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Show room poster
Poster (Please click on the title you would like to see)
Poster Layout
Poster 13 :
Development of massive parallel EB exposure system
Poster 0 : What is MEMS ?
Poster 14 :
Power MEMS
Poster 1 : Optical MEMS and Micro/Nano-Optics
Poster 15 :
MEMS for production, testing, environment and safety
Poster 2 : PZT thin films for MEMS
Poster 16 : Advantest
Poster 3 : Micromachining and packaging
Poster 17 : Ricoh
Poster 4 :
Mechanical sensors
Poster 18 :
U.C.Berkeley (BSAC)
Poster 5 : RF MEMS
Poster 19 :
Fraunhofer institute (FhG)
Poster 6 : Nanomachining
Poster 20 :
Fraunhofer project center in Tohoku university
Poster 7 :
Design and prototyping of CMOS LSI
Poster 21 :
iCAN
Poster 8 :
Sensor network
Poster 22 : MEMS park consortium (MEMSPC)
Poster 9 :
Micro sensors for medical monitoring
Poster 23 :
Open collaboration by
μ
SIC
Poster 10 :
Minimally invasive medical devices and health care devices
Poster 24 :
IMEC (Home of SiGe MEMS)
Poster 11 :
Tactile sensor network
Poster 25 :
IMEC (MEMS for energy harvesters &
electronic nose)
Poster 12 :
Heterogeneous integration of MEMS on LSI by transfer
Poster 26 : Examples of MEMS Industrialization by Tohoku Univ. - industry Collaboration