CaseA:DMD and ink jet printer, Images
and optical MEMS |
CaseB:Pressure
sensor and accelerometer, Gyroscope |
CaseC:RF
MEMS, Nanomachining |
CaseD:Medical
micro sensor, Micro fluidics |
CaseE:Heterogeneous
integration (MEMS on LSI), Harsh environment devices |
CaseF:Power
MEMS, Actuators |
CaseG:Fraunhofer
institute |
CaseH:MEMS
park consortium, μSIC open collaboration |
CaseI:IMEC |
CaseK.CaseL.CaseN:Others |