In-house IC and equipment room

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0 In-house IC and equipment room	1 Design (1) CAD
2 Design (2) layout	3 Mask making, photolithography
4 Wafer process (1) process sequence, etching	5 Wafer process (2) oxidation, diffusion, CVD
6 Wafer process (3) ion implantation, sputtering	7 IC tester
8 Fabricated custom IC (1) (channel length 10μm)	9 Telepathology by improved telecommunication
10 Revolution of telemedicine	11 Demonstration of Telepathology by Hi-vision movie
12 Assembly, measurement	13 Fabricated custom IC (2) barrel shifter, integrated capacitive pressure sensor
14 Deep reactive ion etching (Deep RIE) system	15 Effective drawing of process chart
16 Si epitaxial growth and optical observation of defect (Semiconductor research institute)	17 From “Semiconductor Research Institute (SRI)” to “Nishizawa Memorial Research Center”
18 Nishizawa memorial room

“18 Nishizawa memorial room” is different from the Jun-ichi Nishizawa Memorial Research Center (Micro System Integration Center (μSIC）), so please be aware of the distinction.

Access: 28 Kawauchi, Aoba-ku, Sendai City,Miyagi 980-8576
Tohoku University Kawauchi Campus

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K1 Books,photograph and 0ther materials about Prof. Jun-ichi Nishizawa