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東北大学マイクロシステム融合研究開発センター
〒980-0845 仙台市青葉区荒巻字青葉519-1176
東北大学西澤潤一記念研究センター内
Tel: 022-229-4113 Fax: 022-229-4116
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Case
CaseE：Harsh environment device,Power MEMS,Fluid control
E1 Sensinｇ in harsh environment
E2 SiC mold for glass press-molding
E3 SiC and PZT by lost-mold process,Si
3
N
4
by Reaction sintering
E4 Small size gas turbine engine dynamo
E5 Si micro-turbine and thermoelectric generator
E6 Micro fuel reformer
E７ Micro fuel cell
E8 Intermittent sampling/Continuous blood gas monitor
E9 Micro pump,micro valve and chemical analysis systems for liquid
E10 micro mixer and particle analysis(Hitachi)
E11 Flow sensor and mass-flow controller for gas
E12 Bakable micro valve and anticorrosive mass-flow controller
E13 SAW passive wireless sensor
E14 MEMS materials (WPI-AIMR,FraunhoferENAS)
Case
CaseA
CaseB
CaseC
CaseD
CaseE
CaseF
CaseG
CaseH
CaseI
CaseE：Harsh environment device,Power MEMS,Fluid controlCaseE：Harsh environment device,Power MEMS,Fluid control