| CaseA:DMD and ink jet printer, Images
and optical MEMS |
| CaseB:Pressure
sensor and accelerometer, Gyroscope |
| CaseC:RF
MEMS, Nanomachining |
| CaseD:Medical
micro sensor, Micro fluidics |
| CaseE:Heterogeneous
integration (MEMS on LSI), Harsh environment devices |
| CaseF:Power
MEMS, Actuators |
| CaseG:Fraunhofer
institute |
| CaseH:MEMS
park consortium, μSIC open collaboration |
| CaseI:IMEC |
| CaseK.CaseL.CaseN:Others |
Case / Layout