＜お問い合わせ先＞
東北大学マイクロシステム融合研究開発センター
〒980-0845 仙台市青葉区荒巻字青葉519-1176
東北大学西澤潤一記念研究センター内
Tel: 022-229-4113 Fax: 022-229-4116
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Case
CaseF:Light control,Actuator,Micro system integration intiative,FIRST
F1 2 axis galvano optical scanner(Japan signal)
F2 Electrostatic / Piezoelectric optical scanner
F3 Optical encoder(NTT)
F4 Electrostatic inkjet head
F5 Micro refrigeration system
F6 Digital micro thruster
F7 Electrostatic micro motor/actuator
F8 Distributed electrostatic micro actuator
F9 Piezoelectric micro stage
F10 Lateral motion piezoelectric microactuator
F11 Tactile display and tactile imager
F12 Shared CMOS wafer
F13 Bio LSI and tactile sensor network
F14 Massive parallel EB exposure system
Case
CaseA
CaseB
CaseC
CaseD
CaseE
CaseF
CaseG
CaseH
CaseI
CaseF:Light control,Actuator,Micro system integration intiative,FIRSTCaseF:Light control,Actuator,Micro system integration intiative,FIRST