＜お問い合わせ先＞
東北大学マイクロシステム融合研究開発センター
〒980-0845 仙台市青葉区荒巻字青葉519-1176
東北大学西澤潤一記念研究センター内
Tel: 022-229-4113 Fax: 022-229-4116
HOME
About the show room
Poster
Sample case
Address
access
link
Case
CaseH：Advantest,MEMS Core
H1 MEMS rely
H2 Stealth dising and Deep RIE
H3 Ultra-think resist processing etc.
H4 Vacuum indicator
H5 Fujin made by MEMS
H6 Fabrication of MEMS strap for cellular phone by processing wafers in 9 MEMS factories in Japan
Case
CaseA
CaseB
CaseC
CaseD
CaseE
CaseF
CaseG
CaseH
CaseI
CaseH：Advantest,MEMS Core