＜お問い合わせ先＞
東北大学マイクロシステム融合研究開発センター
〒980-0845 仙台市青葉区荒巻字青葉519-1176
東北大学西澤潤一記念研究センター内
Tel: 022-229-4113 Fax: 022-229-4116
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Case
CaseC：Micro/Nanomachining
C1 Patterning
C2 Etching
C3 LIGA process
C4 Deposition
C5 Anodic bonding
C6 Laser processes and stealth dising
C7 Anodic bondable LTSS with electrical feedthrough
C8 Custom integrated circuit
C9 Probe for scanning probe microscope
C10 Multi-probe date storage
C11 Near-field optical probe and bow-tie antenna
C12 Highly sensitive sensors using thin resonators
C13 Infrared sensor
C14 Electron source
Case
CaseA
CaseB
CaseC
CaseD
CaseE
CaseF
CaseG
CaseH
CaseI
CaseC：Micro/NanomachiningCaseC：Micro/Nanomachining