mu-sic

2021/11/09　November 9th
We exhibit at SEMICON West (Dec. 7-9, 2021) for the first time. The event is hybrid that combines in-person and virtual. Our booth is virtual but is staffed during the event hours. The exhibition will include -Nanomachining/Ultra-high Sensitive Sensing/Smart Materials
-Micro/nano Systems for Robot Control and Advanced Communication
-Micro/nano Systems for Optics and Biomedical
-Open facility "Hands-on-access fab"
We welcome you to visit our booth! SEMICON West web site:
2015/1/27 January 27th
Prof. Masayoshi Esashi was honored with IEEE Andrew S.Grove Award
2011/06/28 June 28th
"MEMS intensive course in Kyoto" page launced
10/5/2010:　"μSIC symposium" page launched
8/18/2010:　 "Prototype Laundromat" home page launched
2010/07/27　"Micro System Integration Conference 2nd" page launched
2010/07/27　"MEMS intensive course in Tsukuba" page launched
2010/07/26　This web page was open.
2010/03/30　"Kickoff symposium" was held.
2015/11/17 November 17th
Tohoku univ. Micro System Integration Center (uSIC) Symposium 2015 will be held in Sendai.
2019/3/4 March 4th
Prof. Shunichiro Tanaka has been recognized as a Fellow of The Japan Institute of Metals and Materials.
2020/5/20 May 20th
Hands-on-access fab (coin laundry) and Jun-ichi Nishizawa Memorial Research Center will reopen tomorrow.
2020/10/29　October 29th
Assistant Professor Yukio Suzuki,Prof.Shuji Tanaka has been honored with the best technology paper award in Sensor Symposium