Tohoku University's Micro System Integration Center was formed to create
scientific and technological innovations in the domain of advanced integration,
working under the aegis of the Special Coordination Funds for Promoting
Science and Technology program of Japan's Ministry of Education, Culture,
Sports, Science and Technology. The center houses two primary organizations:
the Micro System Integration R&D Division (Principal Investigator:
Takahito Ono), currently embarked on a ten-year plan launched in 2007,
and the Micro System Integration R&D Group (Core researcher: Masayoshi
Esashi), embarked on four-year mission under the World-Leading Innovative
R&D Support program. The former organization collaborates with some
some15 companies in an industrial-academic partnership to develop high-value-added
integrated MEMS technology using “shared wafers” and other methods. The
latter organization works with AIST and other institutions to conduct industry-connected
R&D, pursuing projects such as heterointegration, our prototype laundromat,
and our massively parallel electron-beam lithography apparatus. In all
of these programs, the goals are many-fold: to collaborate with a wide
variety of companies, to use our university's accumulated wealth of technological
skills and expertise in the field of microsystem research to achieve practical,
real-world successes, to cultivate a generation of skilled researchers,
to find a way beyond the economic bottlenecks that have begun to hamper
progress in integrated circuit technology, to find practical applications
for technologies in a wide variety of fields, and to strengthen Japan's
industrial competitiveness. In the future we will continue to strengthen
our collaborations in many ways, and we hope that our Micro System Integration
R&D Center will continue to make valuable contributions to science,
technology, and industry.
Kentaro Totsu
