17/1/2023
Infection continues COVID-19 .We would like to ask all of you to reconfirm
your infection control measures and cooperate with us.For the BCP(Action
Guidelines)level of Tohoku University,please see the Tohoku University website .Please continue to submit the "COVID-questionnaire "(updetad on September 29,2022)
MEMS Prototype Laundromat: Supplementary budget resources for the present fiscal year were used to install MEMS equipment on the production line for power transistors in the super clean room at Tohoku University's Nishizawa Memorial Center (formerly known as the Research Institute for Semiconductors). MEMS lines (4/6 inches) have been installed for technologically sophisticated users who have not had access to necessary equipment.
We invite all interested companies to use these new facilities. Direct your questions to Kentaro Totsu at Tohoku University's Micro System Integration Center.
Phone: 022-229-4113
e-mail: totsu @
mems.mech.tohoku.ac.jp
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