About the Micro System Integration Center at Tohoku University
Hands-on-access Fabrication Facility
The fab utilizes 1,800 m² clean room at Jun-ichi Nishizawa Memorial Research Center,
Tohoku University. It demonstrates “open collaboration” to accelerate research and development by offering shared facilities to users, technical information, and process data
obtained by other users. Technical support staff provides comprehensive R&D support.
μSIC is committed to human resource development.
Based on our facilities and accumulated technical information, we develop human resources who can pioneer research and development, and who know the essence of technology through actual experience.
By simultaneously conducting human resource development and R&D, device development is intensely promoted.
There are several cases in which the development of devices has led to successful commercialization.
We support companies in product fabrication. The purpose of this product fabrication is to
demonstrate the universities R&D results as a product in the market and in society, and
to obtain feedback from results or problems through production. We expect that this initiative will accelerate the universities R&D.
Advanced Research Infrastructure for Materials and Nanotechnology
The Ministry of Education, Culture, Sports, Science and Technology (MEXT) has implemented the “Advanced Research Infrastructure for Materials and Nanotechnology (ARIM),” which provides shared equipment, and technical support by skillful engineers.
In addition to supporting domestic and international researchers and engineers through the
shared use of equipment, valuable material data and process data obtained through the shared use at 25 universities and research institutes are collected and accumulated at the data center with the permission of users.To promote nationwide research and development, the accumulated data is widely shared among registered researchers and engineers.
Hands-on-access fab brochure 2025 (PDF)
Examples of Collaborative Research Projects
Tactile Sensor Network System
As part of the Advanced Interdisciplinary Innovation Program, we collaborated with industry partners to develop a tactile sensor system. This system integrates a signal-processing CMOS-LSI compatible with multiple sensors and a 3-axis MEMS force sensor at the wafer level.
This technology enables robots to have human-like tactile sensing on their skin and fingertips.
Let me know if you’d like to adjust the tone for a presentation, academic paper, or promotional material!
ACCESS TO Jun-ichi Nishizawa Memorial Research Center,Tohoku University
From Sendai Station
approx. 30min. Fare: ¥410 (subway ¥250, bus ¥160)
Take the Subway Tozai Line (for Yagiyama Zoo) from Sendai Station to Aobayama Station.
Then transfer (through South 1 Exit) to a bus for Aobadai (Line 10).
Please get off at the Aobadai Bus Terminal. From the bus terminal to Nishizawa Center,
it takes about 5 min to walk. (There are only one or two buses per hour.)
Free parking space is available in front of the building at the center.
approx. 20 min.
Take a taxi from the taxi stand at the west exit of Sendai Station and tell the destination
“Tohoku-Daigaku Nishizawa-Junichi-Kinen-Kenkyu Center 東北大学西澤潤一記念研究センター”
to the driver. Or if he/she does not know it, just say “Aobadai”. You will find the white building
behind (on the east side of) Aoba park driving range.Nishizawa center is that building.
Micro System Integration Center（μSIC）
Nishizawa Center, Tohoku Univ. 519-1176 Aramaki-Aza-Aoba,Aoba-ku, Sendai 980-0845
Phone : +81-22-229-4113 Fax : +81-22-229-4116 e-mail: shisaku-info＠ml.tohoku.ac.jp