Tohoku Univ. Micro System Integration Center（μSIC）
Tohoku Univ. Hands-on-access fab.
How to utilize
■ Users
Companies, Institutions and etc. which work in research on microsystem
can utilize the facility.
■ Utilization form
1. Users can recieve a wide rage of support; technical support, access
to the facility and etc.
2．The fab. will not make contract development like MEMS foudry.
3．Users are charged depending on usage. (facility usage, technical support,
materials cost, equipment usage.)
4．Users are allowed to keep their research closed.
■ How to apply
1．Please contact the address below and let us know an utilization plan
to make an arrangement for prototyping.
2．The fab. can make an estimate for usage if needed.
3．Please apply through the website of Center for Integrated NanoTechnology Support.
4．Applicants are able to access to the facility after the notice of permission
for utilization from proposal review committee.
■ Utilization for product fabrication
Companies are allowed to make products under the condition. It is intended
to activate education research at university by letting us know acheivements
and problems as a result of commercialization of product based on research
and development at university. If you are interested in such a utilization,
please check the content of the files below.
＊Use regulations of Hands-on-access fab.
＊Handling of utilization for product fabrication at hands-on-access fab.(Japanese)
Please fill out the following application form, placing your signature or seals thereon and e-mail the form to totsuATtohoku.ac.jp （AT→＠）
＊An application form for hans-on-access fab.(Japanese)
＊An application form for Utilization for product fabrication at hans-on-access
fab.(Japanese)
＊a caluculation sheet for occupancy of equipment used at hans-on-access
fab.(Japanese)
■ Contact for hans-on-access fab. usage
Tohoku University Micro system integration centre
Assoc. Prof. Kentaro Totsu
519-1176 Aramaki-Aza-Aoba, Aoba-ku, Sendai, Miyagi
980-0845 Japan
Tel. +81-22-229-4113 Fax +81-22-229-4116
e-mail: totsuATtohoku.ac.jp （AT→＠）
Please feel free to inquire regarding visit on hands-on-access fab.
