Tohoku Univ. Micro System Integration center（μSIC）
Tohoku Univ. Hands-on-access fab.
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Tohoku University
Tohoku Univ. Micro System Integration Center（μSIC）
Tohoku Univ. Center for Integrated NanoTechnology Support（CINTS）(Japanese)
Micro/Nano-Machining Research and Education Center, tohoku Univ.(MNC)
Tanaka Shuji Laboratry, Chair of Advanced Bio-Nano Devices, Department
of Bioengineering and Robotics, Tohoku University
MEMS Park Consortium
