Contact

■ Contact for hans-on-access fab. usage
Tohoku University Micro system integration centre
Assoc. Prof. Kentaro Totsu
519-1176 Aramaki-Aza-Aoba, Aoba-ku, Sendai, Miyagi
980-0845 Japan
Tel. +81-22-229-4113 Fax +81-22-229-4116
e-mail: totsuATtohoku.ac.jp　（AT→＠）


■ Contact for application
Assictance Office, Tohoku Univ. Micro System Integration Center
519-1176 Aramaki-Aza-Aoba, Aoba-ku, Sendai, Miyagi
980-0845 Japan
Tel. +81-22-229-4113 Fax +81-22-229-4115
e-mail: micro-shienATbureau.tohoku.ac.jp　（AT→＠）


Please feel free to inquire regarding visit on hands-on-access fab.

 

Contents

Home Equipment(PDF) Price list(PDF)Responsible person list(PDF) UsageApplication forms Contact Map and directions(PDF) Links