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0 In-house IC and equipment room1 Design (1) CAD
2 Design (2) layout3 Mask making, photolithography
4 Wafer process (1) process sequence, etching5 Wafer process (2) oxidation, diffusion, CVD
6 Wafer process (3) ion implantation, sputtering7 IC tester
8 Fabricated custom IC (1) (channel length 10μm)9 Telepathology by improved telecommunication
10 Revolution of telemedicine11 Demonstration of Telepathology by Hi-vision movie
12 Assembly, measurement13 Fabricated custom IC (2) barrel shifter,integrated capacitive pressure sensor
14 Deep reactive ion etching (Deep RIE) system15 Effective drawing of process chart
16 Si epitaxial growth and optical observation of defect
(Semiconductor research institute)
17 From “Semiconductor Research Institute (SRI)” to
“Nishizawa Memorial Research Center”
18 Nishizawa memorial room