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0 In-house IC and equipment room | 1 Design (1) CAD |
2 Design (2) layout | 3 Mask making, photolithography |
4 Wafer process (1) process sequence, etching | 5 Wafer process (2) oxidation, diffusion, CVD |
6 Wafer process (3) ion implantation, sputtering | 7 IC tester |
8 Fabricated custom IC (1) (channel length 10μm) | 9 Telepathology by improved telecommunication |
10 Revolution of telemedicine | 11 Demonstration of Telepathology by Hi-vision movie |
12 Assembly, measurement | 13 Fabricated custom IC (2) barrel shifter,integrated capacitive pressure sensor |
14 Deep reactive ion etching (Deep RIE) system | 15 Effective drawing of process chart |
16 Si epitaxial growth and optical observation of defect (Semiconductor research institute) | 17 From “Semiconductor Research Institute (SRI)” to “Nishizawa Memorial Research Center” |
18 Nishizawa memorial room |