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0 Sendai MEMS showroom | 1 What is MEMS? |
2 Optical MEMS and Micro/Nano-Optics (Hane, Kanamori) | 3 RF MEMS |
4 Mechanical sensors | 5 Micromachining and packaging |
6 Nanomachining and ultra-high sensitive sensing | 7 PZT thin films for MEMS |
8 Sensor network (Kuwano) | 9 Micro sensors for medical monitoring |
10 Minimally invasive medical devices and health care devices (Y. Haga) | 11 Tactile sensor network |
12 Heterogeneous integration of MEMS on LSI by transfer | 13 Development of massive parallel EB exposure system |
14 Power MEMS | 15 MEMS for production, testing, environment and safety |
16 Examples of MEMS industrialization by Tohoku Univ,- industry collaboration | 17 Advantest, High-Frequency, Low power consumption MEMS Relay |
18 Fraunhofer institute (Germany) | 19 Fraunhofer project center in Tohoku University |
20 ICAN (International contest of innovAtioN) | 21 MEMS park consortium |
22 Open collaboration andμSIC | 23 IMEC (Interuniversity Microelectronics Center) (Belgium) |
24 Start-up companies related to μSIC | 25 Activities of Nishizawa center space users |