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0 Sendai MEMS showroom1 What is MEMS?
2 Optical MEMS and Micro/Nano-Optics (Hane, Kanamori)3 RF MEMS
4 Mechanical sensors5 Micromachining and packaging
6 Nanomachining and ultra-high sensitive sensing7 PZT thin films for MEMS
8 Sensor network (Kuwano)9 Micro sensors for medical monitoring
10 Minimally invasive medical devices and health care devices (Y. Haga)11 Tactile sensor network
12 Heterogeneous integration of MEMS on LSI by transfer13 Development of massive parallel EB exposure system
14 Power MEMS15 MEMS for production, testing, environment and safety
16 Examples of MEMS industrialization by Tohoku Univ,-
industry collaboration
17 Advantest, High-Frequency, Low power consumption MEMS Relay
18 Fraunhofer institute (Germany)19 Fraunhofer project center in Tohoku University
20 ICAN (International contest of innovAtioN)21 MEMS park consortium
22 Open collaboration andμSIC23 IMEC (Interuniversity Microelectronics Center) (Belgium)
24 Start-up companies related to μSIC25 Activities of Nishizawa center space users