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| 0 Mini tech museum | 1 Fabrication of photomask |
| 2 Photoresist coating, patterning and etching | 3 Wafer process (oxidation, diffusion, ion implantation) |
| 4 Chemical vapor deposition (CVD) and RF induction heating | 5 Physical vapor deposition (PVD (evaporation、sputtering)) |
| 6 Assembly (dicing, wire bonding, soldering) and test | 7 Vacuum pump (rotary pump, turbo molecular pump, diffusion pump, ion pump, cryopump) |
| 8 Vacuum gauges and quadrupole mass spectrometer | 9 Xray photoelectron spectroscopy (XPS) |
| 10 Auger electron spectroscopy (AES) | 11 Optical microscope for measurement |
| 12 Various measurement method other than optics | 13 Gas laser, photomultiplier and radiation thermometer |
| 14 A liq.4He / liq.N2 cryostat Dewer by double-duplex glass tubing (since 1973) |