＜Address＞
Micro System Integration Center,Tohoku University
519-1176,Aramaki-Aza-Aoba,Aoba-ku,Sendai,
980-0845 Japan
Tel: +81-22-229-4113 Fax: +81-22-229-4116
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Tohoku University
Tohoku University,Micro System Integration Center (μSIC)
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Tohoku University, Tanaka Shuji Lab
Sendai MEMS show room
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