At Jun-ichi Nishizawa Research Center
| In-house LSI and equipment room | Micro System Intergration Center,Tohoku University 519-1176,Aramaki-Aza-Aoba,Aoba-ku,Sendai, 980-0845 Tel: +81-22-229-4113 Fax: +81-22-229-4116  |
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 Evaluation should be made based
on the achievement/cost |
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 In-house LSI and equipment room. |
 Panels and samples of in–house LSI design and fabrication. |
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 Si gas phase epitaxial growth system (glass pipe gas line) |
 Atmospheric pressure CVD system (poly Si, Si3N4, SiO2). |
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 Semiconductor research institute. |
 Prof. Jun-ichi Nishizawa, Process chart. Proc. |
 DVDs of major MEMS conferences. |
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 Instruments using vacuum tubes |
 Phase difference metal microscope |
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