At Jun-ichi Nishizawa Research Center

　Process equipment display room ＜Address＞
Micro System Integration Center,Tohoku University
519-1176,Aramaki-Aza-Aoba,Aoba-ku,Sendai,
980-0845 Japan
Tel: +81-22-229-4113 Fax: +81-22-229-4116
Japanese


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Poster

　Poster　(Please click on the title you would like to see）

Layout
〔1〕Design
[2] Mask making and photolithography process
[3] Wafer process
[4] Assembly & measurement
〔5〕LSI tester
[6] Fabricated custom LSI
Si epitaxial growth and optical observation of the defects





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