At Jun-ichi Nishizawa Research Center
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＜Address＞ Micro System Integration Center,Tohoku University 519-1176,Aramaki-Aza-Aoba,Aoba-ku,Sendai, 980-0845 Japan Tel: +81-22-229-4113 Fax: +81-22-229-4116  |
About the Process equipment display room
Semiconductor process equipment were displayed in Tec-Museum located in
San-Hose, USA. Being stimulated by this, the “Process equipment display
room” was set up for understanding of the design and the fabrication of
semiconductor integrated circuit (IC). Here are used process equipment
made in-house. Posters, materials and wafers on the design and the prototyping
of CMOSLSI in 1980’s in Tohoku University are displayed as well.
Professor Masayoshi Esashi
Micro System Integration Center (μSIC), Tohoku University
