{"id":633,"date":"2025-07-14T11:38:01","date_gmt":"2025-07-14T02:38:01","guid":{"rendered":"https:\/\/www.mu-sic.tohoku.ac.jp\/museum\/wp\/?p=633"},"modified":"2025-07-16T22:54:11","modified_gmt":"2025-07-16T13:54:11","slug":"mini-tech-museum","status":"publish","type":"post","link":"https:\/\/www.mu-sic.tohoku.ac.jp\/museum\/index.php\/2025\/07\/14\/mini-tech-museum\/","title":{"rendered":"Mini tech museum"},"content":{"rendered":"\n
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List of Posters<\/strong><\/p>\n\n\n\n

Download All Files Here >><\/a><\/p>\n\n\n\n

0 Mini tech museum<\/a><\/td>1 Fabrication of photomask<\/a><\/td><\/tr>
2 Photoresist coating, patterning and etching<\/a><\/td>3 Wafer process (oxidation, diffusion, ion implantation)<\/a><\/td><\/tr>
4 Chemical vapor deposition (CVD) and RF induction heating<\/a><\/td>5 Physical vapor deposition (PVD (evaporation\u3001sputtering))<\/a><\/td><\/tr>
6 Assembly (dicing, wire bonding, soldering) and test<\/a><\/td>7 Vacuum pump (rotary pump, turbo molecular pump, diffusion pump, ion pump, cryopump)<\/a><\/td><\/tr>
8 Vacuum gauges and quadrupole mass spectrometer<\/a><\/td>9 Xray photoelectron spectroscopy (XPS)<\/a><\/td><\/tr>
10 Auger electron spectroscopy (AES)<\/a><\/td>11 Optical microscope for measurement<\/a><\/td><\/tr>
12 Various measurement method other than optics<\/a><\/td>13 Gas laser, photomultiplier and radiation thermometer<\/a><\/td><\/tr>
14 A liq.4He \/ liq.N2 cryostat Dewer by double<\/a><\/td><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

List of Cards<\/strong><\/p>\n\n\n\n

Download All Cards from A1 to N4 Here >>>><\/a><\/p>\n\n\n\n

Card Index (A1 to N4 \u2013 Full List)<\/a><\/td><\/tr>
M1 Five\u2010storied pagoda made of glass<\/a><\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

<\/p>\n","protected":false},"excerpt":{"rendered":"

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