{"id":54,"date":"2025-07-12T22:50:34","date_gmt":"2025-07-12T13:50:34","guid":{"rendered":"http:\/\/www.mu-sic.tohoku.ac.jp\/museum\/wp\/?p=54"},"modified":"2025-07-29T22:42:28","modified_gmt":"2025-07-29T13:42:28","slug":"poster_jp_showroom","status":"publish","type":"post","link":"https:\/\/www.mu-sic.tohoku.ac.jp\/museum\/index.php\/2025\/07\/12\/poster_jp_showroom\/","title":{"rendered":"\u4ed9\u53f0MEMS\u30b7\u30e7\u30fc\u30eb\u30fc\u30e0"},"content":{"rendered":"\n

\uff11\uff0e\u7d4c\u7def<\/strong>
\u3000\u5e73\u621017\u5e74\u306b\u7de0\u7d50\u3055\u308c\u305f\u4ed9\u53f0\u5e02\u3068\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fc\u7814\u7a76\u6a5f\u69cb\u3068\u306e\u5354\u529b\u5354\u5b9a\u306e\u4e00\u74b0\u3068\u3057\u3066\u3001\u5e73\u621018\u5e74\u5ea6\u3088\u308a\u6cc9\u533a\u306e\u3231\u30e1\u30e0\u30b9\u30fb\u30b3\u30a2\u5185\u306b\u300c\u4ed9\u53f0\uff2d\uff25\uff2d\uff33\u30b7\u30e7\u30fc\u30eb\u30fc\u30e0\u300d\u3092\u8a2d\u7f6e\u3057\u3001\u30e1\u30e0\u30b9\u30fb\u30b3\u30a2\u3001\u4ed9\u53f0\u5e02\u3001\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fc\u65e5\u672c\u4ee3\u8868\u90e8\u3001\u6771\u5317\u5927\u5b66\u5927\u5b66\u9662\u5de5\u5b66\u7814\u7a76\u79d1\u306b\u3088\u308b\u56db\u8005\u3067\u904b\u55b6\u3092\u884c\u3063\u3066\u304d\u307e\u3057\u305f\u3002
\u3000\u5e73\u621022\u5e74\u3088\u308a\u3001\u6771\u5317\u5927\u5b66\u30de\u30a4\u30af\u30ed\u30b7\u30b9\u30c6\u30e0\u878d\u5408\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\u304c\u3042\u308b\u6771\u5317\u5927\u5b66\u897f\u6fa4\u6f64\u4e00\u8a18\u5ff5\u7814\u7a76\u30bb\u30f3\u30bf\u30fc\u5185\u306b\uff2d\uff25\uff2d\uff33\u8a66\u4f5c\u958b\u767a\u62e0\u70b9\u3067\u3042\u308b\u300c\u8a66\u4f5c\u30b3\u30a4\u30f3\u30e9\u30f3\u30c9\u30ea\u300d\u304c\u7a3c\u52d5\u3057\u3001\u56fd\u5185\u306e\uff2d\uff25\uff2d\uff33\u6280\u8853\u8005\u306b\u3088\u308b\u5229\u7528\u304c\u5897\u3048\u3066\u304d\u305f\u3053\u3068\u304b\u3089\u3001\u30b7\u30e7\u30fc\u30eb\u30fc\u30e0\u3092\u540c\u30bb\u30f3\u30bf\u30fc\u5185\u306b\u79fb\u8a2d\u3057\u3001\uff2d\uff25\uff2d\uff33\u306e\u62e0\u70b9\u3068\u3057\u3066\u60c5\u5831\u63d0\u4f9b\u3092\u884c\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n

\uff12\uff0e\u65bd\u8a2d\u6982\u8981<\/strong>
(1) \u8a2d\u7f6e\u6a5f\u95a2\uff1a\uff2d\uff25\uff2d\uff33\u30d1\u30fc\u30af\u30b3\u30f3\u30bd\u30fc\u30b7\u30a2\u30e0\u3001\u4ed9\u53f0\u5e02\u3001\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fc\u65e5\u672c\u4ee3\u8868\u90e8\u3001\u6771\u5317\u5927\u5b66\u30de\u30a4\u30af\u30ed\u30b7\u30b9\u30c6\u30e0\u878d\u5408\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc
(2) \u5834\u6240\uff1a\u6771\u5317\u5927\u5b66\u897f\u6fa4\u6f64\u4e00\u8a18\u5ff5\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\u672c\u99282\u968e \u3000\uff08\u5bae\u57ce\u770c\u4ed9\u53f0\u5e02\u9752\u8449\u533a\u8352\u5dfb\u5b57\u9752\u8449519-1176\uff09
(3) \u9762\u7a4d\uff1a\u7d04100\u33a1
(4) \u958b\u6240\u65e5\uff1a\u5e73\u621024\u5e745\u670816\u65e5\uff08\u6c34\uff09
(5) \u7279\u5fb4\uff1a
\u30fb\u5c55\u793a\u5185\u5bb9\u3092\u4e00\u65b0\u3057\u3001\u6771\u5317\u5927\u5b66\u306b\u304a\u3051\u308b\uff2d\uff25\uff2d\uff33\u7814\u7a76\u306e\u6b74\u53f2\u3084\u3001\u5404\u7814\u7a76\u5ba4\u306b\u304a\u3051\u308b\u6700\u5148\u7aef\u306e\u7814\u7a76\u5185\u5bb9\u3092\u5c55\u793a\u3057\u307e\u3059\u3002\u307e\u305f\u3001\u6771\u5317\u5927\u5b66\u3068\u95a2\u4fc2\u306e\u6df1\u3044\u6d77\u5916\u7814\u7a76\u6a5f\u95a2\u3084\u5730\u57df\u306e\uff2d\uff25\uff2d\uff33\u95a2\u9023\u4f01\u696d\u306e\u7814\u7a76\u958b\u767a\u6210\u679c\u3082\u5c55\u793a\u3057\u3001\u4ed9\u53f0\u5730\u57df\u306e\u307f\u306a\u3089\u305a\u3001\u4e16\u754c\u306e\uff2d\uff25\uff2d\uff33\u306e\u6b74\u53f2\u3084\u6700\u65b0\u6280\u8853\u3001\u7279\u306b\u7814\u7a76\u958b\u767a\u304b\u3089\u5b9f\u7528\u5316\u306b\u81f3\u308b\u6d41\u308c\u3092\u4e00\u76ee\u3067\u628a\u63e1\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002
\u30fb\u30b7\u30e7\u30fc\u30eb\u30fc\u30e0\u5185\u306b\u30b9\u30af\u30ea\u30fc\u30f3\u3092\u8a2d\u7f6e\u3057\u3001\u300c\u30de\u30a4\u30af\u30ed\u30b7\u30b9\u30c6\u30e0\u878d\u5408\u7814\u7a76\u4f1a\u300d\u306a\u3069\u306e\u5c0f\u898f\u6a21\u30bb\u30df\u30ca\u30fc\u3092\u5b9f\u65bd\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002
\u30fb\u5c55\u793a\u30dd\u30b9\u30bf\u30fc\u3084\u7d39\u4ecb\u30ab\u30fc\u30c9\u306f\u65e5\u82f1\u3069\u3061\u3089\u3082\u7528\u610f\u3057\u3066\u304a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n
\"\"<\/figure>\n\n\n\n

\u300c\u30dd\u30b9\u30bf\u30fc\u4e00\u89a7\u300d\u307e\u305f\u306f\u300c\u30ab\u30fc\u30c9\u4e00\u89a7\u300d\u304b\u3089\u3001\u3054\u89a7\u306b\u306a\u308a\u305f\u3044\u9805\u76ee\uff08PDF\uff09\u3092\u30af\u30ea\u30c3\u30af\u3057\u3066\u304f\u3060\u3055\u3044\u3002<\/p>\n\n\n\n

\u30dd\u30b9\u30bf\u30fc<\/strong>\u4e00\u89a7<\/p>\n\n\n\n

\u4e00\u62ec\u30c0\u30a6\u30f3\u30ed\u30fc\u30c9\u306f\u3053\u3061\u3089>><\/a><\/p>\n\n\n\n

\n
\n
0 \u4ed9\u53f0MEMS\u30b7\u30e7\u30fc\u30eb\u30fc\u30e0<\/a><\/td>1 MEMS\u3068\u306f<\/a><\/td><\/tr>
2 \u5149MEMS\u3068\u30de\u30a4\u30af\u30ed\/\u30ca\u30ce\u5149\u5b66 (\u7fbd\u6839\u3001\u91d1\u68ee)<\/a><\/td>3 RF MEMS<\/a><\/td><\/tr>
4 \u6a5f\u68b0\u91cf\u30bb\u30f3\u30b5<\/a><\/td>5 \u30de\u30a4\u30af\u30ed\u30de\u30b7\u30cb\u30f3\u30b0\u3068\u30d1\u30c3\u30b1\u30fc\u30b8\u30f3\u30b0<\/a><\/td><\/tr>
6 \u30ca\u30ce\u30de\u30b7\u30cb\u30f3\u30b0\u30fb\u9ad8\u611f\u5ea6\u30bb\u30f3\u30b7\u30f3\u30b0<\/a><\/td>7 MEMS\u7528PZT\u8584\u819c<\/a><\/td><\/tr>
8 \u30bb\u30f3\u30b5\u30cd\u30c3\u30c8\u30ef\u30fc\u30af (\u6851\u91ce)<\/a><\/td>9 \u533b\u7528\u30de\u30a4\u30af\u30ed\u30bb\u30f3\u30b5 (\u677e\u5c3e\u3001\u6c5f\u523a \u4ed6)<\/a><\/td><\/tr>
10 \u4f4e\u4fb5\u8972\u533b\u7642\u3068\u30d8\u30eb\u30b9\u30b1\u30a2\u30c7\u30d0\u30a4\u30b9 (\u82b3\u8cc0 \u4ed6)<\/a><\/td>11 \u89e6\u899a\u30bb\u30f3\u30b5\u30cd\u30c3\u30c8\u30ef\u30fc\u30af<\/a><\/td><\/tr>
12 LSI\u4e0a\u3078\u306eMEMS\u306e\u8ee2\u5199\u306b\u3088\u308b\u30d8\u30c6\u30ed\u96c6\u7a4d\u5316<\/a><\/td>13 \u8d85\u4e26\u5217\u96fb\u5b50\u30d3\u30fc\u30e0\u63cf\u753b\u88c5\u7f6e\u306e\u958b\u767a<\/a><\/td><\/tr>
14 Power MEMS<\/a><\/td>15 \u88fd\u9020\u30fb\u691c\u67fb\u30fb\u74b0\u5883\u30fb\u5b89\u5168\u95a2\u4fc2MEMS<\/a><\/td><\/tr>
16 \u7523\u5b66\u9023\u643a\u306b\u3088\u308bMEMS\u306e\u88fd\u54c1\u5316<\/a><\/td>17 Advantest \u9ad8\u5468\u6ce2\u3001\u4f4e\u96fb\u529b\u306b\u3088\u308bMEMS\u30ea\u30ec\u30fc<\/a><\/td><\/tr>
18 \u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u7814\u7a76\u6a5f\u69cb (\u30c9\u30a4\u30c4)<\/a><\/td>19 \u6771\u5317\u5927\u5b66\u306e\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30d7\u30ed\u30b8\u30a7\u30af\u30c8\u30bb\u30f3\u30bf<\/a><\/td><\/tr>
20 iCAN (International Contest of innovAtioN) (\u6238\u6d25 \u4ed6)<\/a><\/td>21 MEMS\u30d1\u30fc\u30af\u30b3\u30f3\u30bd\u30fc\u30b7\u30a2\u30e0<\/a><\/td><\/tr>
22 \u03bcSIC\u306b\u3088\u308b\u30aa\u30fc\u30d7\u30f3\u30b3\u30e9\u30dc\u30ec\u30fc\u30b7\u30e7\u30f3<\/a><\/td>23 IMEC (Interuniversity Microelectronics Centre) (\u30d9\u30eb\u30ae\u30fc)<\/a><\/td><\/tr>
24 \u03bcSIC\u95a2\u9023(\u30b9\u30bf\u30fc\u30c8\u30a2\u30c3\u30d7)\u4f01\u696d<\/a><\/td>25 \u897f\u6fa4\u30bb\u30f3\u30bf\u30fc\u5efa\u7269\u5229\u7528\u8005\u306e\u6d3b\u52d5<\/a><\/td><\/tr><\/tbody><\/table><\/figure>\n<\/div>\n<\/div>\n\n\n\n

\u30ab\u30fc\u30c9<\/strong>\u4e00\u89a7<\/p>\n\n\n\n

A1\uff5eN4\u5168\u3066\u306e\u30ab\u30fc\u30c9\u306e\u4e00\u62ec\u30c0\u30a6\u30f3\u30ed\u30fc\u30c9\u306f\u3053\u3061\u3089>><\/a><\/p>\n\n\n\n

\u30ab\u30fc\u30c9\u4e00\u89a7\uff08A1\uff5eN4\u5168\u3066\u306e\u4e00\u89a7\u3067\u3059\uff09<\/a><\/td><\/tr>
A1\uff5eA14\u306e\u30c0\u30a6\u30f3\u30ed\u30fc\u30c9\u306f\u3053\u3061\u3089>><\/a>
A1 \u8d64\u5916\u7dda\u30bb\u30f3\u30b5\u30fb\u30a4\u30e1\u30fc\u30b8\u30e3
A2 \u8d64\u5916\u7dda\u30bb\u30f3\u30b5
A3 2\u8ef8\u30ac\u30eb\u30d0\u30ce\u96fb\u78c1\u5149\u30b9\u30ad\u30e3\u30ca
A4 DMD (Digital Micromirror Device) (TI (\u30c6\u30ad\u30b5\u30b9\u30fb\u30a4\u30f3\u30b9\u30c4\u30eb\u30e1\u30f3\u30c4) \u7c73\u56fd)
A5 DMD (Digital Micromirror Device) \u306b\u3088\u308b\u6620\u753b\u306e\u30c7\u30a3\u30b8\u30bf\u30eb\u4e0a\u6620\u5316
A6 \u5149\u30a8\u30f3\u30b3\u30fc\u30c0 (NTT)
A7 \u5727\u96fb\u578b\u30fb\u71b1\u578b\u30a4\u30f3\u30af\u30b8\u30a7\u30c3\u30c8\u30d7\u30ea\u30f3\u30bf\u30d8\u30c3\u30c9
A8 \u9759\u96fb\u30a4\u30f3\u30af\u30b8\u30a7\u30c3\u30c8\u30d7\u30ea\u30f3\u30bf\u30d8\u30c3\u30c9
A9 MEMS\u5171\u632f\u5b50 (\u7c73\u56fd)
A10 MEMS\u5171\u632f\u5b50 (\u30c7\u30a3\u30b9\u30af\u3001Lamb\u6ce2 \u4ed6)
A11 FBAR (Film Bulk Acoustic Resonator) \u8584\u819c\u30d0\u30eb\u30af\u97f3\u97ff\u6ce2\u5171\u632f\u5b50
A12 LSI\u4e0a\u306eSAW\u30c7\u30d0\u30a4\u30b9 (\u96c6\u7a4d\u56de\u8def\u4e0a\u306e\u8868\u9762\u5f3e\u6027\u6ce2\u7d20\u5b50)
A13\u53ef\u5909\u5bb9\u91cf\u4ed8\u5e2f\u57df\u53ef\u5909SAW\u30d5\u30a3\u30eb\u30bf
A14 SAW\u30d1\u30c3\u30b7\u30d6\u30ef\u30a4\u30e4\u30ec\u30b9\u30bb\u30f3\u30b5<\/td><\/tr>
B1\uff5eB14\u306e\u30c0\u30a6\u30f3\u30ed\u30fc\u30c9\u306f\u3053\u3061\u3089>><\/a>
B1 \u30d4\u30a8\u30be\u62b5\u6297\u578b\u5727\u529b\u30bb\u30f3\u30b5
B2 \u96c6\u7a4d\u5316\u5bb9\u91cf\u578b\u5727\u529b\u30bb\u30f3\u30b5
B3 \u632f\u52d5\u578b\u5727\u529b\u30bb\u30f3\u30b5 (\u6a2a\u6cb3\u96fb\u6a5f)
B4 \u5bb9\u91cf\u578b\u771f\u7a7a\u30bb\u30f3\u30b5
B5 \u5bb9\u91cf\u578b\u771f\u7a7a\uff7e\uff9d\uff7b\u88fd\u54c1 (\u30ad\u30e3\u30ce\u30f3\u30a2\u30cd\u30eb\u30d0,\u5927\u4e9c\u771f\u7a7a)
B6 MEMS\u30de\u30a4\u30af\u30ed\u30db\u30f3
B7 MEMS\u30de\u30a4\u30af\u30ed\u30db\u30f3 \u30a6\u30a7\u30cf (\u65e5\u6e05\u7d21\uff8f\uff72\uff78\uff9b\uff83\uff9e\uff8a\uff9e\uff72\uff7d)
B8 \u8010\u6e7f\u6027MEMS\u30de\u30a4\u30af\u30ed\u30db\u30f3
B9 \u81ea\u52d5\u8eca\u7528\u5bb9\u91cf\u578b\u52a0\u901f\u5ea6\u30bb\u30f3\u30b5
B10 \u8868\u9762\u30de\u30a4\u30af\u30ed\u30de\u30b7\u30cb\u30f3\u30b0\u306b\u3088\u308b\u52a0\u901f\u5ea6\u30bb\u30f3\u30b5\u30a6\u30a7\u30cf(\u30a2\u30ca\u30ed\u30b0\u30c7\u30d0\u30a4\u30b9\u7c73\u56fd)
B11 \u5404\u7a2e\u52a0\u901f\u5ea6\u30bb\u30f3\u30b5
B12 \u96c6\u7a4d\u5316\u5bb9\u91cf\u578b\u52a0\u901f\u5ea6\u30bb\u30f3\u30b5
B13 3\u8ef8\u52a0\u901f\u5ea6\u30bb\u30f3\u30b5
B14 \u9759\u96fb\u6d6e\u4e0a\u56de\u8ee2\u30b8\u30e3\u30a4\u30ed<\/td><\/tr>
C1\uff5eC14\u306e\u30c0\u30a6\u30f3\u30ed\u30fc\u30c9\u306f\u3053\u3061\u3089>><\/a>
C1 \u96fb\u78c1\u99c6\u52d5\u632f\u52d5\u30b8\u30e3\u30a4\u30ed
C2 \u30b7\u30ea\u30b3\u30f3\u30ea\u30f3\u30b0\u5f0f\u30b8\u30e3\u30a4\u30ed
C3 \u5727\u96fb\u30b8\u30e3\u30a4\u30ed
C4 \u9759\u96fb\u99c6\u52d5\u5bb9\u91cf\u691c\u51fa\u30b8\u30e3\u30a4\u30ed
C5 \u30e8\u30fc\u30ec\u30fc\u30c8\u30fb\u52a0\u901f\u5ea6\u30bb\u30f3\u30b5 (\u30c8\u30e8\u30bf\u81ea\u52d5\u8eca)
C6 \u81ea\u52d5\u8eca\u30fb\u30b9\u30de\u30db\u4ed6\u7528 \u52a0\u901f\u5ea6\u30bb\u30f3\u30b5\u30fb\u30b8\u30e3\u30a4\u30ed
C7 \u30d1\u30bf\u30fc\u30cb\u30f3\u30b0
C8 \u30a8\u30c3\u30c1\u30f3\u30b0 (Deep RIE, XeF2\u30a8\u30c3\u30c1\u30f3\u30b0, \u30a8\u30c3\u30c1\u30f3\u30b0\u4e2d\u539a\u3055\u30e2\u30cb\u30bf)
C9 \u5806\u7a4d
C10 \u8d70\u67fb\u30d7\u30ed\u30fc\u30d6\u9855\u5fae\u93e1(SPM)\u30d7\u30ed\u30fc\u30d6
C11 \u8fd1\u63a5\u5834\u5149\u30d7\u30ed\u30fc\u30d6\u3068\u30dc\u30fc\u30bf\u30a4\u30a2\u30f3\u30c6\u30ca
C12 \u8584\u819c\u5171\u632f\u5b50\u306b\u3088\u308b\u9ad8\u611f\u5ea6\u30bb\u30f3\u30b5
C13 \u30de\u30eb\u30c1\u30d7\u30ed\u30fc\u30d6\u8a18\u9332
C14 \u96fb\u5b50\u6e90<\/td><\/tr>
D1\uff5eD14\u306e\u30c0\u30a6\u30f3\u30ed\u30fc\u30c9\u306f\u3053\u3061\u3089>><\/a>
D1 \u751f\u4f53\u96fb\u4f4d\u691c\u51fa\u7528\u96fb\u6975
D2 \u534a\u5c0e\u4f53\u30a4\u30aa\u30f3\u30bb\u30f3\u30b5 (ISFET)
D3 \u30ab\u30c6\u30fc\u30c6\u30ebpH, CO2\u30bb\u30f3\u30b5
D4 \u9593\u6b20\u30fb\u9023\u7d9a\u8840\u6db2\u30ac\u30b9\u30e2\u30cb\u30bf
D5 ISFET\u306e\u6b6f\u5b66\u30fb\u6df1\u6d77\u30fb\u9b5a\u98fc\u80b2\u7b49\u3078\u306e\u5fdc\u7528
D6 \u30de\u30a4\u30af\u30edISFET\u3068\u96c6\u7a4d\u5316\u30de\u30a4\u30af\u30ed\u30d7\u30ed\u30fc\u30d6
D7 \u30ac\u30b9\u30bb\u30f3\u30b5
D8 \u4f7f\u3044\u6368\u3066\u5316\u5b66\u5206\u6790\u30c1\u30c3\u30d7
D9 \u30d0\u30a4\u30aaLSI\u3068\u89e6\u899a\u30bb\u30f3\u30b5\u30cd\u30c3\u30c8\u30ef\u30fc\u30af (\u5148\u7aef\u878d\u5408\u9818\u57df\u30a4\u30ce\u30d9\u30fc\u30b7\u30e7\u30f3\u5275\u51fa\u62e0\u70b9\u5f62\u6210\u30d7\u30ed\u30b0\u30e9\u30e0)
D10 \u30ab\u30c6\u30fc\u30c6\u30eb\u8840\u5727\u30bb\u30f3\u30b5
D11 \u80fd\u52d5\u30ab\u30c6\u30fc\u30c6\u30eb
D12 \u5f62\u72b6\u8a18\u61b6\u5408\u91d1\u3092\u7528\u3044\u305f\u591a\u95a2\u7bc0\u904b\u52d5\u6a5f\u69cb
D13 \u4f4e\u4fb5\u8972\u533b\u7642\u306e\u30a4\u30e1\u30fc\u30b8\u30f3\u30b0\u6280\u8853
D14 \u4f53\u5185\u57cb\u8fbc\u523a\u6fc0\u88c5\u7f6e<\/td><\/tr>
E1\uff5eE14\u306e\u30c0\u30a6\u30f3\u30ed\u30fc\u30c9\u306f\u3053\u3061\u3089>><\/a>
<\/a>E1 LIGA\u30d7\u30ed\u30bb\u30b9
E2 \u30ec\u30fc\u30b6\u30d7\u30ed\u30bb\u30b9\u3068\u30b9\u30c6\u30eb\u30b9\u30c0\u30a4\u30b7\u30f3\u30b0
E3 \u967d\u6975\u63a5\u5408
E4 \u967d\u6975\u63a5\u5408\u3067\u304d\u308bLTCC\u8cab\u901a\u914d\u7dda\u57fa\u677f (\u30cb\u30c3\u30b3\u30fc)
E5 \u63a5\u5408\u6750\u6599 (WPI-AIMR, \uff8c\uff97\uff73\uff9d\uff8e\uff70\uff8c\uff67ENAS \u2013 \u6771\u5317\u5927)
E6 \u4e57\u308a\u5408\u3044CMOS LSI\u30a6\u30a7\u30cf (\u5148\u7aef\u878d\u5408\u9818\u57df\u30a4\u30ce\u30d9\u30fc\u30b7\u30e7\u30f3\u5275\u51fa\u62e0\u70b9\u5f62\u6210\u30d7\u30ed\u30b0\u30e9\u30e0)
E7 \u30ec\u30fc\u30b6\u6d88\u53bb\u30a6\u30a7\u30cf\u30d7\u30ed\u30bb\u30b9
E8 \u8d85\u4e26\u5217\u96fb\u5b50\u30d3\u30fc\u30e0\u63cf\u753b\u88c5\u7f6e (MPEBW)(\u6700\u5148\u7aef\u7814\u7a76\u958b\u767a\u652f\u63f4\u30d7\u30ed\u30b0\u30e9\u30e0 (FIRST))
E9 \u6db2\u4f53\u7528\uff8f\uff72\uff78\uff9b\uff8e\uff9f\uff9d\uff8c\uff9f\u3068\uff8f\uff72\uff78\uff9b\uff8a\uff9e\uff99\uff8c\uff9e\u30fb\u5316\u5b66\u5206\u6790\uff7c\uff7d\uff83\uff91
E10 \u30de\u30a4\u30af\u30ed\u30df\u30ad\u30b5\u3068\u7c92\u5b50\u5206\u6790 (\u65e5\u7acb)
E11 \u6c17\u4f53\u7528\u30d5\u30ed\u30fc\u30bb\u30f3\u30b5\u30fb\u30de\u30b9\u30d5\u30ed\u30fc\u30b3\u30f3\u30c8\u30ed\u30fc\u30e9
E12 \u30d9\u30fc\u30ab\u30d6\u30eb\u30de\u30a4\u30af\u30ed\u30d0\u30eb\u30d6\u3001\u8010\u8755\uff8f\uff7d\uff8c\uff9b\uff70\uff7a\uff9d\uff84\uff9b\uff70\uff97
E13 \u8010\u74b0\u5883\u30bb\u30f3\u30b7\u30f3\u30b0
E14 \u30ac\u30e9\u30b9\u30d7\u30ec\u30b9\u6210\u5f62\u306e\u305f\u3081\u306e\u70ad\u5316\u73ea\u7d20(SiC)\u30e2\u30fc\u30eb\u30c9<\/td><\/tr>
F1\uff5eF14\u306e\u30c0\u30a6\u30f3\u30ed\u30fc\u30c9\u306f\u3053\u3061\u3089>><\/a>
F1 \u5c0f\u5f62\u30ac\u30b9\u30bf\u30fc\u30d3\u30f3\u30a8\u30f3\u30b8\u30f3\u767a\u96fb\u6a5f
F2 Si\u30de\u30a4\u30af\u30ed\u30bf\u30fc\u30d3\u30f3\u3068\u71b1\u96fb\u767a\u96fb
F3 \uff9b\uff7d\uff84\uff93\uff70\uff99\uff84\uff9e\uff8c\uff9f\uff9b\uff7e\uff7d\u306eSiC\u3068PZT, \u53cd\u5fdc\u713c\u7d50\u306eSi3N4
F4 \u30de\u30a4\u30af\u30ed\u71c3\u6599\u96fb\u6c60
F5 \u30de\u30a4\u30af\u30ed\u71c3\u6599\u6539\u8cea\u5668
F6 \u30c7\u30a3\u30b8\u30bf\u30eb\u30de\u30a4\u30af\u30ed\u30b9\u30e9\u30b9\u30bf (\u56fa\u4f53\uff9b\uff79\uff6f\uff84\uff74\uff9d\uff7c\uff9e\uff9d\uff71\uff9a\uff72)
F7 \u9759\u96fb\u30de\u30a4\u30af\u30ed\u30e2\u30fc\u30bf\u30fb\u30a2\u30af\u30c1\u30e5\u30a8\u30fc\u30bf
F8 \u5206\u5e03\u578b\u9759\u96fb\u30de\u30a4\u30af\u30ed\u30a2\u30af\u30c1\u30e5\u30a8\u30fc\u30bf
F9 \u5727\u96fb\u30de\u30a4\u30af\u30ed\u30b9\u30c6\u30fc\u30b8
F10 \u6a2a\u65b9\u5411\u99c6\u52d5\u5727\u96fb\u30de\u30a4\u30af\u30ed\u30a2\u30af\u30c1\u30e5\u30a8\u30fc\u30bf
F11 \u89e6\u899a\u30c7\u30a3\u30b9\u30d7\u30ec\u30a4\u3068\u89e6\u899a\u30a4\u30e1\u30fc\u30b8\u30e3
F12 \u30de\u30a4\u30af\u30ed\u78c1\u6c17\u51b7\u5374\u6a5f
F13 \u71b1\u578bMEMS\u30b9\u30a4\u30c3\u30c1
F14 \u9759\u96fb\u30fb\u5727\u96fb\u578bMEMS\u30b9\u30a4\u30c3\u30c1<\/td><\/tr>
G1\uff5eG4\u306e\u30c0\u30a6\u30f3\u30ed\u30fc\u30c9\u306f\u3053\u3061\u3089>><\/a>
G1 \u6ce2\u9577\u6383\u5f15\u30d1\u30eb\u30b9\u91cf\u5b50\u30ab\u30b9\u30b1\u30fc\u30c9\u30ec\u30fc\u30b6 (\u6d5c\u677e\u30db\u30c8\u30cb\u30af\u30b9\u3231)
G2 \u5149\u5b66\u5f0f\u6eb6\u878d\u6a39\u8102\u6e29\u5ea6\u30fb\u5727\u529b\u30bb\u30f3\u30b5 (\u9577\u91ce\u8a08\u5668\u3231)
G3 \u9759\u96fb\u5bb9\u91cf\u578b\u5fae\u5dee\u5727\u30bb\u30f3\u30b5\u300c\u30de\u30ce\u30b9\u30bf\u30fc\u300d(\u3231\u5c71\u672c\u96fb\u6a5f\u88fd\u4f5c\u6240)
G4 SEMI MEMS\u30bb\u30df\u30ca\u30fc10\u5468\u5e74<\/td><\/tr>
H1\uff5eH7\u306e\u30c0\u30a6\u30f3\u30ed\u30fc\u30c9\u306f\u3053\u3061\u3089>><\/a>
H1 \u6771\u5317\u5927\u5b66\u3068\u30d9\u30eb\u30ae\u30fcIMEC (Interuniversity Micro Electronics Center)
H2 Poly-SiGe\u306eMEMS\u30bb\u30f3\u30b5\u5fdc\u7528
H3 Poly-SiGe\u3092\u7528\u3044\u305fCMOS IC\u4e0a\u306eMEMS\u30b8\u30e3\u30a4\u30ed
H4 CMOS IC\u4e0aSiGe\u30df\u30e9\u30fc\u30a2\u30ec\u30a4
H5 CMORE SiGeMEMS \u30de\u30eb\u30c1\u30d7\u30ed\u30b8\u30a7\u30af\u30c8\u30a6\u30a7\u30cf
H6 \u30db\u30ed\u30b0\u30e9\u30d5\u30a3\u30c3\u30af \u30c7\u30a3\u30b9\u30d7\u30ec\u30a4
H7 \u30a8\u30cd\u30eb\u30ae\u30cf\u30fc\u30d9\u30b9\u30bf\u7528MEMS\u3068\u96fb\u5b50\u55c5\u899a<\/td><\/tr>
I1\uff5eI2\u306e\u30c0\u30a6\u30f3\u30ed\u30fc\u30c9\u306f\u3053\u3061\u3089>><\/a>
I1 \u5727\u96fb\u30fb\u9759\u96fb\u5149\u30b9\u30ad\u30e3\u30ca
I2 \u30d4\u30ed\u30ea\u83cc\u30a6\u30ec\u30a2\u30fc\u30bc\u6e2c\u5b9a\u5668<\/td><\/tr>
N1\uff5eN4\u306e\u30c0\u30a6\u30f3\u30ed\u30fc\u30c9\u306f\u3053\u3061\u3089>><\/a>
N1 \u8d64\u5916\u7dda\u30a2\u30ec\u30a4\u30bb\u30f3\u30b5 (\u30d1\u30ca\u30bd\u30cb\u30c3\u30af\u3231)
N2 3\u6b21\u5143LSI (\u3231\uff8e\uff9d\uff80\uff9e\uff65\uff98\uff7b\uff70\uff81\uff65\uff72\uff9d\uff7d\uff83\uff68\uff81\uff6d\uff70\uff84\uff65\uff7c\uff9e\uff6c\uff8a\uff9f\uff9d\u5bae\u5ddd\u5ba3\u660e)
N3 \u62bc\u3057\u3066\u767a\u96fb\u3059\u308b\u30a8\u30cd\u30eb\u30ae\u30cf\u30fc\u30d9\u30b9\u30bf\u5f0f\u30ea\u30e2\u30b3\u30f3\u30b9\u30a4\u30c3\u30c1 (EnOcean GmpH)
N4 \u96fb\u6c17\u6cf3\u52d5\u8868\u793a\u7528\u8584\u819c\uff7d\uff72\uff6f\uff81\uff71\uff9a\uff72\u3068\u30aa\u30b7\u30ed\u30e1\u30c8\u30ea\u30c3\u30af\u8840\u5727\u8a08 ((E-pape, \u6771\u4eac\u4e09\u6d0b\u96fb\u6a5f \u6cc9\u7530\u548c\u592b)<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

<\/p>\n","protected":false},"excerpt":{"rendered":"

\uff11\uff0e\u7d4c\u7def\u3000\u5e73\u621017\u5e74\u306b\u7de0\u7d50\u3055\u308c\u305f\u4ed9\u53f0\u5e02\u3068\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fc\u7814\u7a76\u6a5f\u69cb\u3068\u306e\u5354\u529b\u5354\u5b9a\u306e\u4e00\u74b0\u3068\u3057\u3066\u3001\u5e73\u621018\u5e74\u5ea6\u3088\u308a\u6cc9\u533a\u306e\u3231\u30e1\u30e0\u30b9\u30fb\u30b3\u30a2\u5185\u306b\u300c\u4ed9\u53f0\uff2d\uff25\uff2d\uff33\u30b7\u30e7\u30fc\u30eb\u30fc\u30e0\u300d\u3092\u8a2d\u7f6e\u3057\u3001\u30e1\u30e0\u30b9\u30fb\u30b3\u30a2\u3001\u4ed9\u53f0\u5e02\u3001\u30d5\u30e9\u30a6\u30f3\u30db\u30fc\u30d5\u30a1\u30fc\u65e5\u672c\u4ee3\u8868\u90e8 […]<\/p>\n","protected":false},"author":1,"featured_media":52,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[21,18],"tags":[],"class_list":["post-54","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-poster_card_jp","category-exhibition_jp"],"_links":{"self":[{"href":"https:\/\/www.mu-sic.tohoku.ac.jp\/museum\/index.php\/wp-json\/wp\/v2\/posts\/54","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.mu-sic.tohoku.ac.jp\/museum\/index.php\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.mu-sic.tohoku.ac.jp\/museum\/index.php\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.mu-sic.tohoku.ac.jp\/museum\/index.php\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.mu-sic.tohoku.ac.jp\/museum\/index.php\/wp-json\/wp\/v2\/comments?post=54"}],"version-history":[{"count":53,"href":"https:\/\/www.mu-sic.tohoku.ac.jp\/museum\/index.php\/wp-json\/wp\/v2\/posts\/54\/revisions"}],"predecessor-version":[{"id":790,"href":"https:\/\/www.mu-sic.tohoku.ac.jp\/museum\/index.php\/wp-json\/wp\/v2\/posts\/54\/revisions\/790"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.mu-sic.tohoku.ac.jp\/museum\/index.php\/wp-json\/wp\/v2\/media\/52"}],"wp:attachment":[{"href":"https:\/\/www.mu-sic.tohoku.ac.jp\/museum\/index.php\/wp-json\/wp\/v2\/media?parent=54"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.mu-sic.tohoku.ac.jp\/museum\/index.php\/wp-json\/wp\/v2\/categories?post=54"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.mu-sic.tohoku.ac.jp\/museum\/index.php\/wp-json\/wp\/v2\/tags?post=54"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}