{"id":277,"date":"2025-08-14T20:49:06","date_gmt":"2025-08-14T11:49:06","guid":{"rendered":"https:\/\/www.mu-sic.tohoku.ac.jp\/wp\/?p=277"},"modified":"2025-09-15T19:40:15","modified_gmt":"2025-09-15T10:40:15","slug":"%e3%83%9e%e3%82%b9%e3%82%af%e3%83%ac%e3%82%b9%e3%83%aa%e3%82%bd%e3%82%b0%e3%83%a9%e3%83%95%e3%82%a3%e3%83%bc-%e3%83%af%e3%83%bc%e3%82%af%e3%82%b7%e3%83%a7%e3%83%83%e3%83%97%ef%bc%882025-9-3%ef%bc%89","status":"publish","type":"post","link":"https:\/\/www.mu-sic.tohoku.ac.jp\/?p=277","title":{"rendered":"\u30de\u30b9\u30af\u30ec\u30b9\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc \u30ef\u30fc\u30af\u30b7\u30e7\u30c3\u30d7\uff082025\/9\/3\uff09"},"content":{"rendered":"\n<p class=\"wp-block-paragraph\">\u30de\u30b9\u30af\u30ec\u30b9\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc \u30ef\u30fc\u30af\u30b7\u30e7\u30c3\u30d7<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u65e5\u6642\uff1a2025\u5e749\u67083\u65e5\uff08\u6c34\uff09\u300013:30\u201017:10<br>\u5834\u6240\uff1a\u6771\u5317\u5927\u5b66\u897f\u6fa4\u6f64\u4e00\u8a18\u5ff5\u7814\u7a76\u30bb\u30f3\u30bf\u30fc 2\u968e\u3000MEMS\u30b7\u30e7\u30fc\u30eb\u30fc\u30e0<br>\u53c2\u52a0\u8cbb\uff1a\u7121\u6599<br>\u4e3b\u50ac\uff1a\u6771\u5317\u5927\u5b66\u3001\u30cf\u30a4\u30c7\u30eb\u30d9\u30eb\u30b0\u30fb\u30a4\u30f3\u30b9\u30c8\u30eb\u30e1\u30f3\u30c4\u682a\u5f0f\u4f1a\u793e<br>\u7533\u8fbc\u307f\u30d5\u30a9\u30fc\u30e0\uff1a\u3000<a href=\"https:\/\/forms.gle\/CF4vT8qURMc5jCL7A\" target=\"_blank\" rel=\"noopener\" title=\"\">https:\/\/forms.gle\/CF4vT8qURMc5jCL7A<\/a><br>\u554f\u3044\u5408\u308f\u305b\u5148: \u6771\u5317\u5927\u5b66\u30de\u30a4\u30af\u30ed\u30b7\u30b9\u30c6\u30e0\u878d\u5408\u7814\u7a76\u958b\u767a\u30bb\u30f3\u30bf\u30fc\u3000\u65e9\u5ddd\u660c\u5b50<br>E-mail: masako.hayakawa.b1\u3000\u2190\u3000@tohoku.ac.jp\u3092\u3064\u306a\u3052\u3066\u304f\u3060\u3055\u3044\u3002 <br>Tel. 022-229-4113<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">\u30d7\u30ed\u30b0\u30e9\u30e0<br>13:30 Registration<br>13:45 Welcome and introduction to Tohoku University<br>\uff08Kentaro Totsu, \u03bcSIC, Tohoku University\uff09<br>14:00 Latest upgrades of the MLA 150 and DWL 66+ Laser Lithography Systems<br>\uff08Sven Preuss , Product Manager DWL-Series, Heidelberg Instruments Mikrotechnik\uff09<br>14:40 Overview of MLA 150 utilization at Tohoku University and evaluation of photoresist: a case study on SU-8 3005<br>\uff08Yoko Furubayashi, \u03bcSIC, Tohoku University\uff09<br>15:00 GenISys BEAMER application for laser direct writing<br>\uff08Satoshi Shimizu, GenISys K.K.\uff09<br>15:30 Coffee break<br>15:50 Reticle fabrication on DWL 2000 with BEAMER correction<br>\uff08Masaaki Moriyama, \u03bcSIC, Tohoku University\uff09<br>16:20 NanoFrazor, modular nanolithography system<br>\uff08Simon Bonanni, Exploring nanofabrication with the NanoFrazor, Heidelberg Instruments Nano\uff09<br>16:40 Introduction of Hands-on-access Fab, \u03bcSIC<br>\uff08Kentaro Totsu, \u03bcSIC, Tohoku University\uff09<br>17:00 Wrap up<br>17:10 End<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u30de\u30b9\u30af\u30ec\u30b9\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u30fc \u30ef\u30fc\u30af\u30b7\u30e7\u30c3\u30d7 \u65e5\u6642\uff1a2025\u5e749\u67083\u65e5\uff08\u6c34\uff09\u300013:30\u201017:10\u5834\u6240\uff1a\u6771\u5317\u5927\u5b66\u897f\u6fa4\u6f64\u4e00\u8a18\u5ff5\u7814\u7a76\u30bb\u30f3\u30bf\u30fc 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