{"id":140,"date":"2020-04-28T17:09:45","date_gmt":"2020-04-28T08:09:45","guid":{"rendered":"http:\/\/www.mu-sic.tohoku.ac.jp\/coin\/wp\/?page_id=140"},"modified":"2026-03-31T13:21:08","modified_gmt":"2026-03-31T04:21:08","slug":"equipments","status":"publish","type":"page","link":"https:\/\/www.mu-sic.tohoku.ac.jp\/coin\/index.php\/equipments\/","title":{"rendered":"\u88c5\u7f6e\u30fb\u6599\u91d1"},"content":{"rendered":"\n<h2 class=\"wp-block-heading\">\u4e3b\u306a\u88c5\u7f6e<\/h2>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\uff08i\u7dda\u30b9\u30c6\u30c3\u30d1\u3001\u30b3\u30f3\u30bf\u30af\u30c8\u30a2\u30e9\u30a4\u30ca\u3001\u30de\u30b9\u30af\u30ec\u30b9\u30a2\u30e9\u30a4\u30ca\u3001\u30ec\u30fc\u30b6\u63cf\u753b\u88c5\u7f6e\u3001\u96fb\u5b50\u7dda\u63cf\u753b\u88c5\u7f6e\u3001\u30b3\u30fc\u30bf\u30c7\u30d9\u30ed\u30c3\u30d1\u3001\u30b9\u30d4\u30f3\u30b3\u30fc\u30bf\u3001\u30db\u30c3\u30c8\u30d7\u30ec\u30fc\u30c8\u306a\u3069\uff09<\/li>\n\n\n\n<li>\u9178\u5316\u62e1\u6563\u7089<\/li>\n\n\n\n<li>\u30a4\u30aa\u30f3\u6ce8\u5165\u3001\u71b1\u51e6\u7406<\/li>\n\n\n\n<li>CVD\uff08LP-CVD\u3001PE-CVD\u3001\u5e38\u5727\u71b1CVD\u3001MOCVD\uff09\u3001ALD\u3001\u30be\u30eb\u30b2\u30eb\u6210\u819c<\/li>\n\n\n\n<li>\u30b9\u30d1\u30c3\u30bf\u3001\u84b8\u7740\u3001\u3081\u3063\u304d<\/li>\n\n\n\n<li>\u30c9\u30e9\u30a4\u30a8\u30c3\u30c1\u30f3\u30b0\uff08DRIE\u3001ICP-RIE\u3001CCP-RIE\u3001CDE\u3001VaporHF\uff09<\/li>\n\n\n\n<li>\u30a6\u30a7\u30c3\u30c8\u30a8\u30c3\u30c1\u30f3\u30b0\uff08Si\u7b49\u65b9\u6027\u3001Si\u7570\u65b9\u6027\u3001\u91d1\u5c5e\u3001\u305d\u306e\u4ed6\uff09<\/li>\n\n\n\n<li>\u63a5\u5408\u3001\u30c0\u30a4\u30b5\u3001\u7814\u78e8\u3001\u30ec\u30fc\u30b6\u52a0\u5de5\u3001\u30b5\u30f3\u30c9\u30d6\u30e9\u30b9\u30c8\u30013D\u30d7\u30ea\u30f3\u30bf\u30fc\u3001\u30ef\u30a4\u30e4\u30dc\u30f3\u30c0\u3001\u30a4\u30f3\u30af\u30b8\u30a7\u30c3\u30c8<\/li>\n\n\n\n<li>\u30ca\u30ce\u30a4\u30f3\u30d7\u30ea\u30f3\u30c8\uff08UV\u3001\u71b1\uff09<\/li>\n\n\n\n<li>\u5404\u7a2e\u6e2c\u5b9a\u3001\u8a55\u4fa1<\/li>\n<\/ul>\n\n\n\n<p><\/p>\n\n\n\n<p><a href=\"https:\/\/nanonet.go.jp\/facility.php?mode=category&amp;mode2=2&amp;code=2\" data-type=\"URL\" target=\"_blank\" rel=\"noreferrer noopener\">\u88c5\u7f6e\u4e00\u89a7\uff08\u6587\u90e8\u79d1\u5b66\u7701\u30de\u30c6\u30ea\u30a2\u30eb\u5148\u7aef\u30ea\u30b5\u30fc\u30c1\u30a4\u30f3\u30d5\u30e9\u30bb\u30f3\u30bf\u30fc \u5171\u7528\u8a2d\u5099\u691c\u7d22\uff09<\/a><\/p>\n\n\n\n<p><a rel=\"noreferrer noopener\" href=\"http:\/\/www.mu-sic.tohoku.ac.jp\/coin\/wp\/wp-content\/uploads\/brochure2025.pdf\" data-type=\"URL\" target=\"_blank\">\u8a66\u4f5c\u30b3\u30a4\u30f3\u30e9\u30f3\u30c9\u30ea\u30d1\u30f3\u30d5\u30ec\u30c3\u30c8\uff08202<\/a><a href=\"http:\/\/www.mu-sic.tohoku.ac.jp\/coin\/wp\/wp-content\/uploads\/brochure2025.pdf\" data-type=\"URL\" target=\"_blank\" rel=\"noreferrer noopener\">5<\/a><a rel=\"noreferrer noopener\" href=\"http:\/\/www.mu-sic.tohoku.ac.jp\/coin\/wp\/wp-content\/uploads\/brochure2025.pdf\" data-type=\"URL\" target=\"_blank\">\u5e74\u5ea6\u7248\uff09<\/a><\/p>\n\n\n\n<p><a rel=\"noreferrer noopener\" href=\"http:\/\/www.mu-sic.tohoku.ac.jp\/coin\/wp\/wp-content\/uploads\/brochure2025.pdf\" data-type=\"URL\" target=\"_blank\">Hands-on-access fab brochure 2025<\/a><\/p>\n\n\n\n<div style=\"height:62px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u88c5\u7f6e\u30ea\u30b9\u30c8\u30fb\u6599\u91d1\u8868\u3000<\/h2>\n\n\n\n<p><a href=\"http:\/\/www.mu-sic.tohoku.ac.jp\/coin\/wp\/wp-content\/uploads\/ryoukinhyou-2026.pdf\" target=\"_blank\" rel=\"noreferrer noopener\">PDF\u30d5\u30a1\u30a4\u30eb\u306f\u3053\u3061\u3089<\/a>\uff082026\u5e744\u6708\uff5e\uff09<\/p>\n\n\n\n<div style=\"height:62px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<h2 class=\"wp-block-heading\">\u88c5\u7f6e\u4e88\u7d04\u72b6\u6cc1\u78ba\u8a8d\u30da\u30fc\u30b8<\/h2>\n\n\n\n<p><a href=\"http:\/\/resv.mu-sic.tohoku.ac.jp\">\u88c5\u7f6e\u306e\u4e88\u7d04\u72b6\u6cc1\u306f\u3053\u3061\u3089<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u4e3b\u306a\u88c5\u7f6e \u88c5\u7f6e\u4e00\u89a7\uff08\u6587\u90e8\u79d1\u5b66\u7701\u30de\u30c6\u30ea\u30a2\u30eb\u5148\u7aef\u30ea\u30b5\u30fc\u30c1\u30a4\u30f3\u30d5\u30e9\u30bb\u30f3\u30bf\u30fc \u5171\u7528\u8a2d\u5099\u691c\u7d22\uff09 \u8a66\u4f5c\u30b3\u30a4\u30f3\u30e9\u30f3\u30c9\u30ea\u30d1\u30f3\u30d5\u30ec\u30c3\u30c8\uff082025\u5e74\u5ea6\u7248\uff09 Hands-on-access fab brochure 2025 \u88c5\u7f6e\u30ea\u30b9\u30c8\u30fb\u6599\u91d1 [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"templates\/fullwidth.php","meta":{"footnotes":""},"class_list":["post-140","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/www.mu-sic.tohoku.ac.jp\/coin\/index.php\/wp-json\/wp\/v2\/pages\/140","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.mu-sic.tohoku.ac.jp\/coin\/index.php\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.mu-sic.tohoku.ac.jp\/coin\/index.php\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.mu-sic.tohoku.ac.jp\/coin\/index.php\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.mu-sic.tohoku.ac.jp\/coin\/index.php\/wp-json\/wp\/v2\/comments?post=140"}],"version-history":[{"count":42,"href":"https:\/\/www.mu-sic.tohoku.ac.jp\/coin\/index.php\/wp-json\/wp\/v2\/pages\/140\/revisions"}],"predecessor-version":[{"id":1146,"href":"https:\/\/www.mu-sic.tohoku.ac.jp\/coin\/index.php\/wp-json\/wp\/v2\/pages\/140\/revisions\/1146"}],"wp:attachment":[{"href":"https:\/\/www.mu-sic.tohoku.ac.jp\/coin\/index.php\/wp-json\/wp\/v2\/media?parent=140"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}