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東北大学マイクロシステム融合研究開発センター
〒980-0845 仙台市青葉区荒巻字青葉519-1176
東北大学西澤潤一記念研究センター内
Tel: 022-229-4113 Fax: 022-229-4116
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Poster
Sample case
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Case
CaseB:Gyro,RF(SW,resonator)
B1 Electromagnetically driven resonating gyro
B2 Electrostastcally driven capacitive sensing gyro
B3 Yaw rate/acceleration sensor (Toyata motor)
B4 Piezoelectric Gyro(Toyota CRL,Epson toyokom,Tohoku Univ,-Toyota motor,Matsushita electric industry)
B5 Electrostatically lavitated rotational gyro(Tohoku Univ.-Tokyo keiki)
B6 Accelerometer and gyro for mobile equipments(ST microelectronics,Invensense)
B7 3D motion sensor/Combo sensor(Tokin,Invensense)
B8 MEMS resonator(SiTime)
B9 MEMS resonator(Nakamura(Tohoku Univ.),Tohoku Univ.-Shimazu Corp.,Tohoku Univ.-Nihon denpa kogyo)
B10 Multi-band filter on LSI(Tohoku Univ.-NICT)
B11 SAW device on LSI
B12 Tunable SAW filter using variable capacitor
B13 MEMS switch(thermal)
B14 MEMS switch(electrostatic,piezoelectric)
Case
CaseA
CaseB
CaseC
CaseD
CaseE
CaseF
CaseG
CaseH
CaseI